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1)  diamond film
金刚石膜
1.
Mechanical polishing of CVD diamond films;
机械法抛光加工金刚石膜研究
2.
Chemically etching vapor-deposited diamond films by using hydrogen plasma under graphitization effect of iron;
氢等离子体在铁催石墨化作用下对CVD金刚石膜的刻蚀
3.
Experimental investigation and bonding mechanism of brazing diamond film;
钎焊金刚石膜的试验研究及机理分析
2)  diamond films
金刚石膜
1.
Effect of Ti interlayer on thermal residual stresses of CVD diamond films;
钛过渡层对CVD金刚石膜热残余应力的影响
2.
Deposition of diamond films on steel substrate by precoating an intermediate layer;
钢基底上预镀中间层沉积金刚石膜
3.
Steady and rapid deposite CVD diamond films under high-power using microwave;
微波法大功率稳定快速沉积CVD金刚石膜
3)  diamond coating
金刚石膜
1.
Study on CVD Diamond Coating on Cemented Carbide Substrate with High Content of Cobalt;
高钴硬质合金基底化学气相沉积金刚石膜的研究
2.
Technology of microwave plasma chemical vapor deposition diamond coating upon WC-Co tools;
WC-8.0%Co基底上微波等离子化学气相沉积金刚石膜
4)  diamond-films
金刚石-膜
5)  diamond film
金刚石薄膜
1.
Influence of texture on residual strain in CVD free standing diamond films;
织构对CVD自支撑金刚石薄膜残余应变的影响
2.
Molecular dynamics simulation of thermal conductivity of thin diamond films;
金刚石薄膜热导率的分子动力学模拟
3.
Effect of various surface treatments on diamond films deposited on WC-6%Co;
硬质合金基体腐蚀工艺对金刚石薄膜的影响
6)  DLC films
类金刚石膜
1.
Some difficulties of vacuum graphite cathodic arc deposition have been overcome and DLC films have been successfully fabricated by means of VCAD method.
克服了真空石墨电弧沉积过程中的一些难点,成功地利用真空阴极电弧沉积法制备了类金刚石膜,并对其表面形貌、硬度及结合强度、结构进行了分析,结果表明,真空阴极电弧沉积法是制备综合性能良好的光亮类金刚石膜的有效方法。
2.
There are mainly two methods of preparing DLC films: physical vapor deposition and chemical vapor deposition.
本课题首先使用等离子体增强化学气相沉积设备在不同参数下制备类金刚石膜,其次用原子力显微镜对所制备试样的表面粗糙度、摩擦力和摩擦系数进行表征,最后用纳米压痕仪测量薄膜的硬度和杨氏模量。
补充资料:金刚石膜
分子式:
CAS号:

性质:用低压或常压化学气相沉积(CVD)方法人工合成的金刚石膜。金刚石的硬度在固体材料中最高,达HV100GPa,热导率为100W·cm-l·K-1,为铜的5倍,禁带宽度为6.6~8.0eV,室温电阻率高达1016Ω·cm,通过掺杂可以形成半导体材料。金刚石在从紫外到红外广阔频带里都有很高的光学透射率,它还是一种优良耐腐蚀材料。金刚石膜的制备方法有热化学气相沉积(TCVD)和等离子体化学气相沉积(PCVD)两大类。现正在研究将研制得到的金刚石膜作耐磨涂层、声学膜片、光学窗口、集成电路高热导基片。还研究在硅片上外延单晶金刚石膜,以制备金刚石器件。

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