Study on Fabrication of Conductor by Microjet and Laser Hybrid Direct Writing Method;

Study on Laser-MicroPen/MicroJet Direct Writing Technology for Integrated Fabrication of MEMS Micro-Structures

A piezoelectric ultrasonic focusing system is developed for microjetting biological microarrays.

Characterization of the pressure wave in piezoelectrically actuated micro jet;

Based on the shear vibration of piezoelectric ceramics,a novel piezoelectric micro jet is designed.

As an important actuator in the micro fluidic system , the micro jet could eject many kinds of substances (ink , polymer , solid) .

This paper made theoretic analysis of the piezoelectric micro-jet developed in the institute and defined the driving conditions of the micro-jet.

A piezoelectric micro-jet was presented,which can precisely provide a liquid sample in an order of nano-liter.

Uniform digital discretization and micro injection of solid powders had been realized by the driving and disturbing of the pulse intertia force produced by the piezoelectric actuator.

Uniform digital discretization and micro injection of microfluids had been realized by the driving and disturbing of the pulse intertia force produced by the piezoelectric ceramics actuator.