5) DUV excimer laser
深紫外准分子激光
1.
A real-time exposure dose control algorithm for DUV excimer lasers in a step and scan projection lithography is presented.
提出了一种面向步进扫描投影光刻机的深紫外准分子激光实时曝光剂量控制算法。
6) UV laser
紫外激光
1.
Gaseous photodissociation deposition kinetics of UV laser-induced Mn_2 (CO)_(10);
紫外激光诱导Mn_2(CO)_(10)的气相光解离沉积动力学
2.
Influence on the absorption spectrum of lead silicate glass films after UV laser irradiation;
紫外激光照射对硅酸铅玻璃薄膜吸收谱的影响
3.
Study on surface peel process of Si under radiation of brief pulse UV laser;
短脉冲紫外激光辐照下硅材料表面剥离过程研究
补充资料：机载激光测深系统
见海洋遥感测深。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条