1) laser projection lithography
激光投影光刻
1.
Design of fold laser projection lithography lens;
折叠式激光投影光刻物镜的设计研究
2.
For the laser projection lithography system used for the production of large-area,high processing throughput,and cost-effective printed circuit boards(PCB),its illumination system is simulation-designed and optimized using ZEMAX optical design software,and the optimized results are analyzed.
针对大面积、高产量和节约型印制电路板(PCB)生产使用的激光投影光刻机,利用ZEMAX工程光学设计软件,对其照明系统进行了模拟设计与优化,并对优化后的结果进行了分析。
2) Projection lithography
投影光刻
1.
Soft X-ray projection lithography technology;
软X射线投影光刻技术及其发展
2.
Design of diffractive optical elements for off-axis illumination in projection lithography;
投影光刻离轴照明用衍射光学元件设计
3.
Soft X-ray projection lithography is expected as a candidate for VLSI p roduction in the near future.
软 X射线投影光刻作为特征线宽小于 0 。
4) Stepper
[英]['stepə] [美]['stɛpɚ]
投影光刻机
1.
The Key Craftwork and Technique of Assembling and Adjusting of Projective Lens of Stepper;
投影光刻机镜头的装校关键工艺与技术
5) projection photolithography
投影光刻法
6) 193 nm projection lithography
193nm投影光刻
补充资料：投影光刻
分子式：
CAS号：
性质：一种把图像投影在光敏材料上的方法。它可免于光学掩模版和光敏材料涂层的接触。
CAS号：
性质：一种把图像投影在光敏材料上的方法。它可免于光学掩模版和光敏材料涂层的接触。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条