1) electrostatic comb-finger actuator
静电梳齿微驱动器
1.
Silicon micromachined gyroscope is mainly driven by electrostatic comb-finger actuator which has advantages of simple structure,low power supply,high sensitivity and not susceptible to temperature.
静电梳齿微驱动器因其结构简单、功耗低、灵敏度高、受温度影响小,成为硅微陀螺仪的主要驱动方式。
2) MEMS comb-drive actuator
MEMS静电梳齿驱动器
1.
Design of MEMS comb-drive actuator for large-displacement and low-voltage;
大位移、低电压驱动MEMS静电梳齿驱动器的设计与研究
3) Electrostatic comb actuator
静电梳状驱动器
4) electrostatics comb actuator
静电梳齿致动器
5) comb-drive actuator
梳齿驱动器
1.
Design and fabrication of MEMS comb-drive actuator with large displacement
大位移MEMS静电梳齿驱动器的设计及制作
2.
A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed.
制作了一种低驱动电压、位移达100μm的梳齿驱动器。
6) electrostatic comb micro-resonators
静电梳齿微谐振器
1.
Parameter design of electrostatic comb micro-resonators
静电梳齿微谐振器结构参数化设计
补充资料：百齿梳
1.一种多齿的梳子。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条