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1)  phase-shifting interferometry
相移干涉
1.
Research on phase-shifting interferometry contrast three-dimensional topography of ultra precision surface
超精表面三维形貌相移干涉检测实验研究
2.
It employs two optical nondestructive methods:computer microvision for in-plane motion measurement and phase-shifting interferometry for out-of-plane motion mesasurement.
它采用了2种光学无损测量方法:计算机微视觉方法用于面内运动测量;相移干涉方法用于离面运动测量。
2)  Phase-shifting interferometry
移相干涉
3)  phase-shifting interferometry
相移干涉术
1.
Phase-shifting interferometry and generalized digital phase-shifting interferometry;
相移干涉术及广义相移数字全息干涉术
2.
Optical experimental verification of two-step generalized phase-shifting interferometry
两步广义相移干涉术的光学实验验证
4)  phase shifting interferometry
移相干涉术
5)  phase-shifting interferometer
移相干涉仪
1.
Advances in vibration cancellation phase-shifting interferometer;
移相干涉仪的抗振技术研究进展
2.
In modern digital phase-shifting interferometry (PSI), the phase-shifting error of piezoelectric transducer (PZT) optical phase shifter, which is the basic device of phase-shifting interferometer, directly effects measurement accuracy during wavefront phase unwrapping with phase-shifting interferograms.
压电晶体 (PZT)光学移相器作为移相干涉仪 (PSI)的关键部件 ,其移相误差直接影响被测波面的相位复原精度。
3.
However, the external micro-vibrations are often the dominant error sources in phase-shifting interferometers since its sensitivity.
移相干涉术(PSI)是一种高精度、高灵敏度、非接触式光学测试方法,易受环境振动的影响,环境振动是移相干涉仪测量误差的主要来源之一。
6)  phase shifting interferometry
相移干涉术
1.
A vertical-shaft-type large field Mirau phase shifting interference microscope is developed based on phase shifting interferometry.
基于相移干涉术,研制了立式大视场Mirau相移显微干涉仪,它包括干涉成像和照明系统、竖直方向上的压电陶瓷传感器(PZT)微位移系统、被测面的两维扫描系统、图像采集和处理系统,是无限筒长显微镜结构和Mirau干涉结构的叠加。
补充资料:相消干涉
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性质:在光的干涉中,两光波互相抵消振幅等于零,称为相消干涉。

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