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1)  nanometer resolution
纳米级分辨率
1.
Super-precision positioning stage with nanometer resolution;
具有纳米级分辨率的超精密定位工作台
2.
The key technology in the design of ultraprecision stage with large travel and nanometer resolution is discussed,and the design proposal,the material,the guide way,the drive manner,measuring feedback and control system of some ultraprecision stage with large travel at home and abroad are introduced.
讨论了大行程纳米级分辨率超精密工作台设计中的关键技术,介绍了目前国内外典型的大行程超精密工作台所采用的设计方案、材料、导轨、驱动方式、测量反馈及控制系统。
2)  nanometer resolution
纳米分辨率
1.
Base on understanding of characteristics of ballscrew,the positioning systems with ballscrew for long stroke positioning with nanometer resolution are reviewed.
通过分析滚珠丝杠驱动机构的特点,对目前利用这种驱动方式实现大行程的具有纳米分辨率的定位系统的关键技术进行论述。
3)  micro-nano resolution
微纳米级分辨力
1.
This paper introduces the design and working principle of a pneu-pin sensor with micro-nano resolution, which is based on the pneumatic path of differential pressure type; and the static characteristics of the sensor are analyzed in theory and studied in experiment.
提出一种基于差压式气路的微纳米级分辨力气针传感器的设计和工作原理,并对其静态特性进行了理论分析和实验研究。
4)  Nanometer Resolution Motion
纳米分辨率运动
5)  Nano-meter resolution
纳米分辨
6)  nanometer resolution
纳米分辨力
1.
Development of a two-dimensional ultra precision positioning system with nanometer resolution;
具有纳米分辨力二维超精密定位系统的研制
2.
Focusing-servo mechanism with nanometer resolution for laser direct writing device;
用于激光直写设备的纳米分辨力调焦伺服机构
补充资料:具有原子级分辨率的扫描隧道显微镜


具有原子级分辨率的扫描隧道显微镜


  蜜些 坦有原了级分辨率的扫描隧道显微偏
  
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