Simulation and comparison of several segmented micro deformable mirrors;

Shape functions were used to describe the surfaces of the micro def ormable mirrors in working state,and four kinds of micro deformable mirrors wit h different arrays were simulated in aberrated wavefronts correction.

A system-level behavioral model of segmented piston-like micro deformable mirrors was accomplished by utilizing our own-developed integrated design platform for MEMS CAD.

This paper points out the bott le neck the research of traditional deformable mirror faced and lists some advantag es of micro deformable mirror based MEMS technology.

Fitting capabilities of rectangular array and hexagonal array segmented micro deformable mirrors on the basis of micorelectromechanical system technology are analyzed in terms of the characteristics of the mirror shape.

In order to reduce the cost and shorten the design cycle, accurate and efficient system level modeling of micro deformable mirror involving optical phase modulation and mechanical and electrostatic coupling would inv.

Compensation of the Thermal Aberrations in Laser Resonators Through MEMS-DMs;

The compensation of wave front aberrations in laser resonators through MEMS-DMs;

This paper introduces the data communication between the micro-deformable mirror and the high voltage digital driver in micro-adaptive optical system.

But existing experimental segmented micro deformable mirrors still suffer from two defects: unacceptable PV(peak-to-valley) value and it is not applicable to infrared spectrum.