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1)  Ion beam assisted deposition
离子束辅助淀积
1.
Ion beam assisted deposition of infrared wideband antireflection coating on micro optical components used in low temperature;
离子束辅助淀积低温微光学元件红外宽带增透膜
2)  PLD with assisted oxygen ion beam
氧离子束辅助PLD共淀积
3)  ion assistance deposition
离子辅助淀积
4)  ion beam assisted deposition(IBAD)
离子束辅助沉积
1.
The microstructure and morphology of the lead telluride optical thin films prepared by ion beam assisted deposition(IBAD) were observed by atomic force microscopy(AFM).
利用原子力显微镜(AFM)研究了离子束辅助沉积碲化铅(PbTe)薄膜的微观结构和表面形貌。
2.
Hf films were synthesized by ion beam assisted deposition(IBAD).
采用离子束辅助沉积方法 (IBAD)在Si(111)衬底上沉积了铪薄膜。
5)  ion beam assisted deposition
离子束辅助沉积
1.
Amorphous and metastable crystalline phases formed by ion beam assisted deposition in immiscible systems;
离子束辅助沉积引发互不固溶系非晶相和亚稳晶相形成
2.
Preparation of high power laser films based on ion beam assisted deposition;
离子束辅助沉积制备高功率激光薄膜的研究
3.
Electron emission suppression characteristic of molybdenum grid coated with Hf by ion beam assisted deposition;
离子束辅助沉积铪膜抑制栅电子发射性能研究
6)  ion beam assisted deposition (IBAD)
离子束辅助沉积
1.
In this work, we studied the microstructure, surface morphology, annealing performance, composition and mechanical properties of the Er-doped A1203 photonic thin films prepared by Ion Beam Assisted Deposition (IBAD) method.
本文通过不同的方法(TEM、AFM、SEM、XRD、EDX)研究了用离子束辅助沉积的方法制备的掺Er光波导Al_2O_3(和掺Er_2O_(3-) Al_2O_3、不掺Er-Al_2O_3)薄膜的微观结构、表面形貌、退火特性、成分以及力学性能等,试图对Al_2O_3薄膜从不同方面作以评价,为改进制备光波导镀膜方法提供重要的信息。
补充资料:双低能离子束薄膜淀积设备


双低能离子束薄膜淀积设备


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