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1)  X-ray transmission gratings
X射线透射光栅
1.
For fabricating X-ray mask of high line-density X-ray transmission gratings,the field stitching of E-beam lithography was analyzed when patterning high line-density gratings;by using pattern correction and low sensitive 950 k PMMA resist,the proximity effect of electron beam was effectively depressed when exposing thick resist spun on polyimide membrane.
为了制备高线密度X射线透射光栅掩模,分析了电子束光刻中场拼接对高线密度光栅图形的影响;利用几何校正技术和低灵敏度的950 k的PMMA电子束抗蚀剂,克服了电子束的邻近效应对厚胶图形曝光的影响。
2.
The manufacture of high-line-density X-ray transmission gratings for X-ray spectroscopy by using electron beam lithography and X-ray lithography was reported.
针对X射线透射光栅摄谱仪中的高线密度光栅,研究了采用电子束曝光和X射线曝光技术结合制作高线密度X射线透射光栅的工艺技术。
2)  X-ray transmission grating
X射线透射光栅
1.
Fabrication of high-aspect-ratio and high-density X-ray transmission grating
大高宽比、高线密度X射线透射光栅的制作
2.
Using the same fabrication processes,the X-ray transmission grating,which has the line density of 3333 1/mm and the thickness of 1000 nm,has been fabricated.
本文针对X射线成像波带片和光栅在X射线显微成像技术中的应用,把电子束光刻和X射线光刻技术相结合,在深入研究电子束光刻和X射线光刻工艺技术的基础之上,成功制作了最外环宽度为100 nm,厚度为700 nm和1300 nm的大高宽比X射线成像波带片,制作了线密度为3333 l/mm,厚度为1000 nm的大高宽比、高线密度X射线透射光栅
3)  Soft X-ray transmission grating
软X射线透射光栅
4)  X-ray grating
X射线光栅
1.
The diffraction performance of X-ray grating based on the Fresnel diffraction theory is presented in the case of polychromatic source.
基于Fresnel衍射理论,分析了复色光源X射线光栅衍射效率。
5)  soft X-ray metal transmission grating
软X射线金属型透射光栅
6)  transmission grating
透射光栅
1.
The fabrication techniques for soft X-ray transmission gratings;
X射线透射光栅制作技术
2.
Searching white light interference fringes of Michelson interferometer by using transmission grating;
利用透射光栅寻找迈克耳孙干涉仪的白光干涉条纹
3.
Numerical analysis of diffraction for hyperbolic cylinder transmission grating
双曲柱面透射光栅衍射的数值分析
补充资料:透射光栅
分子式:
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性质:衍射光栅的一种。在透明玻璃上刻制很多条相互平行、等距、等宽的狭缝,利用多缝衍射原理,使复合光发生色散的光学元件。它可透过入射光,因而这种光栅的性能较差,所以光栅光谱仪均不采用它而采用反射光栅作为色散元件。

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