Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate,an automatic control system were established,which could maintain steady vacuum degree.

To realize the real-time control of vacuum environment in the static and dynamic performance test of micro gas pressure sensor with micro-hotplate, simulations to the vacuum testing environment were carried out.

Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate,an automatic control system were established,which could maintain steady vacuum degree.

This paper presents the working principle, processing circuits, and integrating processes of thermal gas pressure microsensors.

Three types of test circuits, including constant temperature circuit, constant power circuit and constant bias circuit were designed according to resistance of the heater in thermal gas pressure microsensors.

The Role of Four-electrode Chemical Etching in Production of Micropressure Transducer;

Novel method used to measure sensitivity of piezoelectric micropressure sensor;

A new model of SOIM micropressure sensor is designed with electrostaticclose-joint technique of silicon boracium silicate glass and thinning technique of single crystalsilicon micrometer grade，acquiring the prepardtion method of this structure and itscharacteristics：high-temperature resistance, anti-shock, high limited pressure.

Neural network arithmetic of atmospheric pressure sensor and realization by MCU;

In this design, an atmospheric pressure sensor whose resistance changes with pressure is adopted.