Research on transmission diffraction characteristics of sub-micron gratings for light guide plate;

By using rigorous coupled-wave theory,the relationship between the first order transmission efficiency and the depths of grooves and the incidence angles is analyzed when lights transmit from sub-micron gratings′ optically denser medium to optically thinner medium.

Design and fabrication of sub-micron grating with given filter character for anti-counterfeiting;

The light-guiding properties of sub-micron gratings have been studied based on the linear part of the relationship curves.

Firstly, the diffraction properties of sub-micron gratings is analyzed using rigorous coupled-wave theory, including the relationship of the direction of diffraction light in each grade and grating period, and the r.

Based on the hydrodynamic energy transport model, the influence of substrate doping density on performance for deep sub micron grooved gate PMOSFET is studied using two dimensional device simulator MEDICI and is compared to that of the counterpart conventional planar device.

Optical proximity correction for improving pattern quality in submicron photolithography;

In order to study the feasibility of submicron lithography using second harmonic light of a copper vapor laser(CVL), a 1∶1 catadioptric projection lens, and an illumination system which consists of a rotating diffuser and a ligth pipe, are designed and constructed.

Experimental results of deep submicron lithography with a excimer laser are reported in this paper.