1) RF MEMS switch
射频MEMS开关
1.
The optimum process condition is obtained,and the silicon nitride thin films deposited by the process condition have been successfully applied in RF MEMS switch.
采用了等离子体增强化学气相沉积法(plas-ma-enhanced chemical vapor deposition,PECVD)在聚酰亚胺(polyimide,PI)牺牲层上生长氮化硅薄膜,讨论沉积温度、射频功率、反应气体流量比等工艺参数对氮化硅薄膜的生长速率、氮硅比、残余应力等性能的影响,得到适合制作接触式射频MEMS开关中悬梁的氮化硅薄膜的最佳工艺条件。
2.
Background and significance of studying on RF MEMS switch are overviewed.
概述射频MEMS开关的研究背景及意义,介绍国内外射频MEMS开关的研究现状,列举出两种主要的射频MEMS开关:电容耦合并联式开关和金属-金属接触串联式开关的结构、工作原理、性能比较。
3) RF MEMS Switches
RF MEMS开关
1.
RF MEMS Switches Resonant Frequency Offset by Residual Stresses;
残余应力对RF MEMS开关谐振频率偏移的影响
2.
The reliability and failure mechanisms of RF MEMS switches were one of the most important problems,and it related to the future use of RF MEMS switches,he reliability of RF MEMS switches introduced,the failure modes and mechanisms of series resistive switches and shunt capacitive switches discussed.
本文介绍了RF MEMS开关的可靠性问题,详细探讨了串联电阻式开关和并联电容式开关的失效模式及失效机理,并对今后RF MEMS开关可靠性方面的工作进行了展望。
3.
This paper based on the technology of RF MEMS and focused on RF MEMS switches and phase shifters.
RF MEMS开关方面,理论分析了电容式MEMS开关和接触式MEMS开关的工作状态、电磁特性,并仿真实现。
4) RF MEMS switch
RF MEMS开关
1.
Fabrication and Study of the RF MEMS Switches;
RF MEMS开关器件的制作及研究
2.
Design and fabrication of DC to 30 GHz DC-contact shunt RF MEMS switch
DC～30GHz并联接触式RF MEMS开关的设计与制造
3.
The antenna introduced in this paper is frequency-reconfigurable and the feed configuration can be changed,with the length of a rectangular slot being changed using an RF MEMS switch.
利用RF MEMS开关控制天线模型中矩形加载槽的长度来实现频率可重构,从天线等效LC振荡回路和谐振回路电流路径的改变等两方面分析了频率可重构原理。
5) RF-MEMS switches
RF-MEMS开关
1.
Bulk micromachining processes and surface sacrificial processes were connected by Si/glass bonding for making RF-MEMS switches.
介绍了一种新的RF-MEMS开关制作工艺,利用静电键合技术将表面微加工工艺与体硅加工工艺结合在一起完成开关上下电极的组合;说明了如何在普通环境下进行图形对准;通过静电力的理论计算和键合试验,分析了铝台阶对硅/玻璃静电键合的影响,得出铝台阶厚度低于100nm时键合效果较好;对有无铝台阶时的静电键合电流特性进行比较,分析了硅/玻璃界面电荷分布及其运动情况,为RF-MEMS开关的设计与制作提供了有意义的参考。
6) MEMS optical switch
MEMS光开关
1.
The design method of MEMS optical switch acting as high optical energy interrupter is investigated by simulations and experiments,it includes the influence of aligning irregularities on transmission efficiency,design methods and guide lines of actuator.
仿真和实验研究了一种作为高功率激光能量续断器的光纤直接连接型MEMS光开关的设计方法,包括光纤对准误差对激光传能特性的影响、致动器的设计原则与基本性能指标。
2.
Expansibility is a very important performance for the design of MEMS optical switch array.
在MEMS光开关阵列设计中,扩展性是一项非常重要的指标。
补充资料：肺癌经皮肿瘤内射频治疗
肺癌经皮肿瘤内射频治疗
介入放射学技术。在经皮穿刺活检技术上发展起来的一种用高频电磁波治疗肺癌的方法。在活检以后，通过保留的穿刺针将高频电磁场导入肿瘤内施行辐射，射频电磁波在生物介质中产生的热及非热效应可凝固癌组织，杀死癌细胞。根据肿瘤的大小，可分别采取单点和多点辐射，使肿瘤破坏更彻底。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条