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1)  ZrO 2(Y 2O 3) thin film
ZrO2(Y2O3)薄膜
2)  electrical and gas sensitive properties
Y2O3-SnO2薄膜
3)  Y2O3 films
Y2O3薄膜
1.
The structure,components and electrical characteristics of Y2O3 films annealed at different temperatures are studied.
采用射频磁控反应溅射法,成功地在n-Si衬底上制备了高κ栅介质Y2O3薄膜。
4)  Y_2O_3/ZrO_2
Y2O3/ZrO2
1.
 Ultrafine Y_2O_3/ZrO_2 powder is prepared with ZrOCl_2·8H_2O, Y(NO_3)_3·6H_2O,ammonia as starting materials by co-precipitation method.
以ZrOCl2·8H2O、Y(NO3)3·6H2O、浓氨水等为起始原料,通过共沉淀工艺制备了Y2O3/ZrO2超细粉体。
5)  zirconia(Y_2O_3)
ZrO2(Y2O3)
6)  ZrO_2 thin film
ZrO2薄膜
1.
Influence on the microstructure of ZrO_2 thin films deposited at different O_2 partial pressure and substrate temperature was analysed by X-ray diffraction (XRD) technique, the surface roughness and laser damage threshold also were measured.
采用X射线衍射(XRD)技术分析了不同充氧条件和沉积温度对ZrO2薄膜组成结构的影响,并对不同工艺下制备的薄膜的表面粗糙度和激光损伤阈值进行了测量。
补充资料:Baddeleyite(ZrO2)
CAS:12036-23-6
分子式:ZrO2
分子质量:123.22
中文名称:斜锆石
英文名称:baddeleyite;Baddeleyite(ZrO2);caldasite
说明:补充资料仅用于学习参考,请勿用于其它任何用途。
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