1) micro-acoustic sensor
微声传感器
1.
A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.
设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。
2) miniature silicon sensor
硅微型声传感器
3) acoustic sensor
声传感器
1.
An NEMS acoustic sensor based on the resonant tunnelling effect of AlAs/InGaAs/GaAs;
基于AlAs/InGaAs/GaAs共振隧穿效应的纳机电声传感器研制
2.
Finite element analysis of ZnO piezoelectric thin film acoustic sensor;
ZnO压电薄膜声传感器的有限元分析
3.
The research of the electret acoustic sensor signal acquisition system;
驻极体声传感器信号采集系统研究
5) vector hydrophone
硅微矢量水声传感器
1.
The encapsulation and testing of a vector hydrophone based on silicon;
硅微矢量水声传感器的封装及测试方法研究
补充资料：微声
1.微小的名声。 2.细小的声音。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条