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1)  Micro electrostatic motor
微静电马达
2)  Ni electrostatic wobble micromotor
微静电wobble马达
3)  piezoelectric micromotor
压电微马达
1.
Simulation and experimental study of non-contact piezoelectric micromotor;
非接触压电微马达的仿真与实验研究
2.
A non-contact piezoelectric micromotor has been fabricated and the resonant frequency of the stator is measured by HP4191A impedance/gain-phase analyzer.
研制了一种非接触压电微马达,通过阻抗分析仪对定子进行扫频测试,确定其共振频率,并且详细介绍了SU 8胶转子制作的工艺流程。
4)  electromagnetic micromotor
电磁微马达
1.
A micrometer-size microrobot driven by electromagnetic micromotor which is fabricated by MEMS technology is presented and solutions to control the small microrobot are described.
介绍一种基于MEMS技术制作的电磁微马达驱动的毫米级移动微机器人及其控制方案。
5)  Electromagnetic Micromotor
电磁型微马达
1.
In biomedical, flow control and analysis of chemical fluid and cooling of the solid state devices, there has been a large demand for a micro flow control and measurement system, in which the micropumps are an essential component The electromagnetic micromotor with an outer diameter of 2 mm which is microfabricated by Shanghai Jiao Tong University is used as a driving source of the micropump.
作者利用上海交通大学研制成功的、由微细加工工艺制备的、直径为2mm的电磁型微马达作驱动源 ,并配以电火花加工工艺制备的蜗壳和Ti合金叶轮制成旋转式微泵。
6)  piezoeletric inchworm motor
压电微动马达
补充资料:寄微之 时微之为虢州长史。
【诗文】:
高天默默物茫茫,各有来由致损伤。
鹦为能言长剪翅,龟缘难死久搘床。
莫嫌冷落抛闲地,犹胜炎蒸卧瘴乡。
外物竟关身底事,谩排门戟系腰章?





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