This paper aims at the circs of that it mainly depends on the workers experience during the process of ultra-precision lapping and polishing, and exists strong subjectivity, no considering choosing procedure at the point of view of saving time, so a resolving method to design the system of process optimum and intelligent control was presented.

This paper introduced lapping-polishing and ultraprecise lapping-polishing technology,analyzed the development of lapping-polishing as well as the present state of ultra-precise lapping-polishing technology development,and listed some methods of ultra-precise lapping-polishing.

The Primary Study of Superpolishing of LiGaO 2 Single Crystal for a Substrate of GaN Thin Film;

The definition of supersmooth surfaces and the factors influencing the superpolishing quality are presented in this paper.

This paper introduces the operating scheme of ultra-precision polishing machine and its control requirements.

In view of this, this thesis proposes the use of abrasive flowing machining technology for ultra-precision polishing of nozzle.

Surface roughness of supper-smooth polishing glass is nano-scale,and working precision of ultra-precision polishing glass is molecular/atomic scale.

To tackle the problem in the course of super precise lapping and polishing,the expert system to direct the operation of(super) precising lapping and polishing is designed.