1) electrostatic self-excited driving
静电自激驱动
2) self-excitation drive circuit
自激驱动电路
1.
A realization method of the self-excitation drive circuit of the micromachined gyroscope with AGC function is presented.
提出了一种加入AGC功能的微机械陀螺自激驱动电路的实现方法。
3) electrostatic actuation
静电驱动
1.
The method of electrostatic actuation and induced electromotive force(EMF) detection were put forward according to the structural feature of the nano-beam.
利用氧化、光刻、刻蚀、溅射等传统MEMS加工工艺,在绝缘衬底上的硅(SOI)基片上制作出一种厚度只有50 nm的双端固支结构的硅纳米谐振梁;在实验室条件下,针对实验中谐振梁的结构特点,提出了静电激励与感生电动势检测(EMF)的测量方法,并利用专业的Conventorware MEMS仿真软件及ANSYS有限元分析软件,定量地给出合适的静电驱动电压,同时初步估算了梁谐振时将会产生的感生电动势的大小,并对此分析结果提出了相应的测试电路,为下一步对这种超薄纳米梁的实际测试工作提供了可行性的理论参考。
2.
In the design of Micro-Electromechanical Systems CMEMS) devices, an important method is called the electrostatic actuation, which is based on an electrostatic-controlled tunablecapacitor.
在微机电系统(MEMS)装置设计方面，一种很重要的方法被称为静电驱动。
4) electrostatically actuated
静电驱动
1.
Electrostatically actuated microelectromechanical deformable mirrors;
一种静电驱动微机械变形反射镜
2.
An electrostatically actuated micromechanical beam was developed as the basic structural unit of a programmable phase grating based on microoptoelectromechanical systems (MOEMS).
静电驱动的微机械装置是许多微机电系统(MEMS)中的重要模块。
5) electrostatic actuating
静电驱动
1.
The design of structure was put forward from the theory of electrostatic actuating and some aspect associated with the process such as etching and bonding were discussed in details.
从静电驱动的角度阐述此种反射镜的结构设计原理,并对具体加工中的腐蚀和键合工艺进行了详细讨论。
6) electrostatic drive
静电驱动
1.
The electrostatic drive mechanism is the most popular and standard design of microactuators due to its simplicity and improved range of linearity.
由于静电驱动具有结构简单、响应时间短和功耗小等优点,在微执行器中得到了广泛的应用。
2.
Finally we give analytical results of electrostatic drive based on different structures.
并根据不同结构 ,给出了静电驱动等方面的分析结果。
补充资料：自调自净自度
【自调自净自度】
（术语）同自调项。
（术语）同自调项。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条