1) MEMS micro force sensor
MEMS微力传感器
2) MEMS pressure sensor
MEMS压力传感器
1.
This paper aims at MEMS phenomenon of MEMS pressure sensor temperature drifts.
文中针对MEMS压力传感器的温度漂移的现象,作了温度漂移原因的分析,以及采取了合适的温度补偿方法,设计了合适的温度补偿电路,通过实验取得了较好的效果。
2.
RF MEMS capacitive switch and capacitive MEMS pressure sensor were used for developing the techniques for investigation of reliability and testability of MEMS devices.
鉴于MEMS器件的门类、品种繁多、所用的敏感材料各异以及MEMS制造技术的多样性和复杂性,本论文则主要针对两种典型的MEMS器件(RF MEMS开关与电容式MEMS压力传感器)进行相关的研究,为MEMS器件更进一步的发展提供技术的积累。
3.
In order to solve the problem of temperature drift in the pressure testing of the aircraft aerodynamic parameters,a calibration system of MEMS pressure sensor based on MAX1452 was presented.
为解决飞行器气动参数测试系统中压力测量时的温度漂移问题,设计了一种基于MAX1452的MEMS压力传感器校准系统。
3) MEMS sensor
MEMS传感器
1.
Studying MEMS sensor of oil exploration;
石油勘探MEMS传感器的研究
2.
In the telemetry of rocket and cannon projectiles,we can use IMU based on MEMS sensors to measure flying attitude of projectile.
在弹箭飞行遥测中,采用基于MEMS传感器的惯性测量组合(IMU)来测试弹箭飞行姿态数据,该方法构成的测试系统体积小、抗过载高、功耗低、数据处理简单直观可靠、对弹载结构改动不大且成本低。
3.
Batch microassembly of MEMS sensors is limited by the manual manipulation required specially trained technicians.
手工操作限制了MEMS传感器的批量生产。
4) novel MEMS microwave power sensor
新型MEMS微波功率传感器
5) microforce sensor
微力传感器
1.
Microforce Sensors Based on Microcantilevers with Two Piezoelectric PZT Thin-Film Elements;
基于双压电PZT薄膜单元的悬臂梁式微力传感器研究
2.
A novel microforce sensor with microcantilever structure based on PT/PZT/PT piezoelectric thin films is proposed.
提出了一种基于PT/PZT/PT压电薄膜微悬臂梁结构的微力传感器。
6) micro force sensor
微力传感器
1.
A novel three-dimensional micro force sensor based on MEMS technology was developed in symmetry of structure.
开发了一种基于MEMS技术制作的三维微力传感器,传感器为完全对称结构,由4根垂直放置和1根悬臂放置的硅梁连接而成。
2.
As a micro force sensor,a non capsulated 1MHz extension quartz resonator is damped by hydrodynamic forces when approaching an object.
以谐振频率为 1MHz的未封装伸长型晶振作为微力传感器逼近样品表面 ,在此过程中晶振受到流体阻尼 ,其振动特性发生变化 ,通过检测振动幅值的变化即可获得样品表面形貌信息。
3.
A square structure 3 dimentional micro force sensor by using silicon semiconductor is developed and could be changed into a 5 dimentional micro force sensor by only a small modifying.
采用硅基应变片设计了一种可用于精密微装配作业过程,检测x、y、z方向微接触力的三维微力传感器;经微小改动后,该传感器可成为五维微力传感器。
补充资料：微力
1.微小的能力;微薄的力量。常用作谦词。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条