1) reactive evaporation in ionized oxygen
离子氧反应蒸发
2) ion beam-assisted reactive deposition
离子辅助反应蒸发技术
3) plasma enhanced evaporating
等离子体增强反应蒸发沉积
1.
Study on fluorine-doped indium oxide films deposited by plasma enhanced evaporating;
等离子体增强反应蒸发沉积的氟掺杂氧化铟薄膜的性质
4) Reactive evaporation
反应蒸发
1.
High k dielectric Er_2O_3 were deposited on p-type Si(100)substrates by reactive evaporation using metallic Er source at room temperature in an oxygen atmosphere.
采用高真空反应蒸发法在未加热的p型Si(100)衬底上实现了非晶Er_2O_3高k栅介质薄膜的生长。
2.
High quality ITO films are prepared onto K9 glass substrates by oxygen ion-assisted electron beam reactive evaporation.
采用氧离子辅助电子束反应蒸发工艺在K9玻璃基底上制备了性能优异的ITO薄膜。
5) Reaction evaporation
反应蒸发
1.
The preparation of ZnO thin films by reaction evaporation is successful for the first time.
用反应蒸发法制备成功ZnO导电薄膜,并给出薄膜的形貌显微照片、XRD图谱、光电效应的测量结果以及其结果与电阻率、薄膜光电子迁移率的关系。
6) REBE
电子束反应蒸发技术
补充资料：高能重离子反应
见高能核－核碰撞。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条