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1)  Rutherford backscattering technique
卢瑟福背散射技术
1.
The projected range,the range straggling,and the depth distribution for 400 keV Er ions implanted in Si crystal with a dope of 5×1015 ions/cm2 were studied by Rutherford backscattering technique.
利用卢瑟福背散射技术研究了能量为400 keV、剂量为5×1015ions/cm2的铒离子注入Si晶体的平均投影射程、射程离散和深度分布。
2)  Rutherford . backscattering spectrometry-channeling
卢瑟福背散射-沟道技术
3)  Rutherford backscattering and ion channeling
卢瑟福背散射/沟道技术
4)  rutherford backscattering and ion channeling measurements
卢瑟福背散射沟道技术
5)  Rutherford backscattering spectroscopy
卢瑟福背散射
1.
The mixing effect of three different film/substrate systems, Ti/Al, Al/Ti and Ni/Ti, which were irradiated by intense pulsed ion beam, was studied with Rutherford backscattering spectroscopy (RBS).
采用卢瑟福背散射(Rutherford backscattering spectroscopy,RBS)方法对强脉冲离子束辐照Ti/Al、Al/Ti 和Ni/Ti三组薄膜/衬底体系所形成的混合层进行了研究。
6)  RBS
卢瑟福背散射
1.
Analysis of the distribution of Rb in Ion-exchanged KTP Waveguide by RBS
卢瑟福背散射分析离子交换KTP波导的Rb元素分布
2.
Rutherford backscattering (RBS) spectrum was used to measure the Ti concentration depth profile in H13 steel after Ti ion implantation.
利用卢瑟福背散射谱测量了离子注入表面的成分 ,并采用逐层递推法得出了钛在H13钢中的浓度深度分布 ,借助掠面x射线衍射考察了注入表面的相结
3.
By synchrotron X-ray diffraction (XRD) and Rutherford back scattering(RBS),the microstructure evolution of oxidized Ni/Au contact to p-GaN annealed at different temperature in air are investigated.
用卢瑟福背散射(RBS)和同步辐射X射线衍射(XRD)研究了p-GaN上的Ni/Au电极在空气下不同温度合金后的微结构的演化,并揭示这种接触结构的欧姆接触形成机制。
补充资料:卢瑟福背散射
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性质:基于带电粒子弹性散射的分析方法。这种弹性散射作用产生的出射粒子方向与入射方向的夹角接近180°,最初由卢瑟福作了理论分析和实验测量,故亦称卢瑟福背散射。可用于化合物成分分析,薄膜厚度测量,深度分布测量以及材料阻止本领测量等。

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