HfOxNy thin films were deposited by radio frequency reactive magnetron sputtering onto multi-spectral ZnS substrates at different oxygen partial pressure.

HfOxNy thin films were deposited by RF reactive magnetron sputtering on multi-spectral ZnS substrates at different oxygen partial pressure.

Based on the theory of Kubelka Munk, the optical properties of phosphor alumina protective layer of compact fluorescent lamp is discussed, and the effect of these two layers' thickness on the lumen output of lamps is presented.