The parameters of capacitive micromachined gyroscope structure were confirmed by theory research and emulation analysis.

Test method of micromachined gyroscope chip;

Sample detection of capacitive micromachined gyroscope sensing signal;

Conditioning circuit of capacitive micromachined gyroscope;

Digital readout system for a micro-machined gyroscope and its demodulation algorithm;

Signal process for the non-drive silicon micro-machined gyroscope;

Study on modeling for multidisciplinary design optimization of micro-machined gyroscope

Separation and identification for structure error parameter in vibratory silicon MEMS gyroscopes;

The design of an extended Kalman filter for magnetometer and MEMS gyroscope/accelerometer integrated attitude determination;

Math principles for piezoresistive MEMS gyroscopes interface circuits;

An improved GM-AR model for a micromechanical gyroscope's nonstationary random signals

The micromechanical gyroscope is a kind of angular rate sensor which making use of the coriolis effect to measure angular rate.

The quality factor of microstructure being vacuum encapsulated varies from hundreds to thousands;testing the quality factor of vacuum encapsulation micromechanical gyroscopes is of great importance.