1.
Realization of interface between MEMS process simulation and finite element software
MEMS工艺模拟与有限元软件接口的实现(英文)
2.
Novel THz Integrated Horn Antenna Based on MEMS Technology
基于MEMS工艺的八角形前腔亚毫米波集成喇叭天线
3.
The Study on the Design and Fabrication Process of MEMS Vibration Sensor;
MEMS振动传感器的设计及制作工艺研究
4.
Theoretical Optimization and Process Study on RF MEMS Varactors;
RF MEMS压控电容理论优化和工艺研究
5.
Design & Fabrication Technique of MEMS-DMs;
MEMS-DMs设计与工艺技术研究
6.
Design and Fabrication Research of MEMS-Based Electric Field Sensors;
MEMS电场传感器的设计与工艺研究
7.
Packing Technology of High Temperature Pressure Transducer
MEMS耐高温压力传感器封装工艺
8.
Study of MEMS Compound Sacrificial Layer
一种MEMS复合牺牲层工艺的研究
9.
Research on Fabrication of Silicon Micro-cantilevers based on MEMS Technology
基于MEMS技术硅微悬臂梁制作工艺研究
10.
Study on the silicon-nitride film in MEMS switches
MEMS开关中氮化硅薄膜工艺研究
11.
A Technique of Shortened Procedures on MEMS Machining Based on Laser Writing;
基于激光直写技术的MEMS短流程加工工艺研究
12.
Design and Process Research of MEMS Bionic Vector Underwater Acoustic Sensor;
MEMS仿生矢量水声传感器设计及其工艺研究
13.
Study on Simulation and Fabrication of Magnetic Bead Microchip Based on MEMS Technology;
基于MEMS技术的磁珠微芯片的模拟及工艺研究
14.
Study on Fabrication Process of RF MEMS Switch and Test of Its DC Property;
射频MEMS开关的制作工艺研究及其直流特性测试
15.
Research on C-MEMS Technology for Fabricating Biochip Carbon Microelectrodes;
生物芯片碳微电极的C-MEMS制备工艺研究
16.
Experimental Study on Processing Resigual Stresses in the Film and Base-wafer of MEMS;
MEMS薄膜基片中的工艺残余应力实验分析
17.
Research on Some Basic Issues of MEMS Packaging Based on Process Mechanics;
基于工艺力学的MEMS封装若干基础问题研究
18.
Fabrication and Testing of the Capacitive Acceleration Microsensor Based on MEMS;
基于MEMS加速度微传感器制作工艺及测试