1.
Silicon Carbon Nitride Thin Film Grown by Hot-Filament Chemical Vapor Deposition
热丝化学气相沉积制备SiCN薄膜的研究
2.
Preparation and properties of SiCN diffusion barrier film for Cu interconnect in ULSI
SiCN扩散阻挡层薄膜的制备及特性研究
3.
Synthesis of SiCN Ceramics with Tailored Structures via the Non-Oxide Sol-Gel Reactions;
无氧溶胶—凝胶反应合成结构可控SiCN陶瓷
4.
Preparation of n-type SiCN Thin Film and Investigation of Its Ohmic Contact
n型SiCN薄膜的制备及其欧姆接触特性研究
5.
Crystallization of Amorphous SiCN Ceramic Annealed in Vacuum
真空气氛下非晶硅碳氮(SiCN)陶瓷的高温晶化行为
6.
Characterization of Oxygen Impurities in SiCN Films
等离子体技术沉积SiCN薄膜中杂质O的来源、化合状态及其对薄膜结构和性能的影响