1.
High-performance MEMS RF Passive Components and Silicon Micromachined Technology;
高性能MEMS射频无源器件与三维硅微机械加工技术
2.
Design and Fabricate Process of a Three-frame MEMS Gyroscope;
三框架硅微机械陀螺的结构设计及加工工艺研究
3.
tivated micromachining
电子束显微机械加工
4.
Theoretical and Experimental Research on the Si-based MOEMS Acceleration Seismic Geophone;
硅微光机械加速度地震检波器理论与实验研究
5.
Research on Design and Read-out Technology of Comb Silicon Micro-mechanical Accelerometer;
叉指式硅微机械加速度计设计与检测技术研究
6.
Research and Fabrication on the Si-based MOEMS Acceleration Seismic Geophone;
硅基微光机械加速度地震检波器的研制
7.
Research on Factors of Zero Position Offset in Silicon Mechanical Micro-accelerometer;
硅微机械加速度计零位偏移的影响因素研究
8.
Temperature Compensation of MEMS Accelerometer in Attitude Heading Reference Systemm
姿态参照系统中硅微机械加速度计的温度补偿
9.
PACKAGING OF WAVEGUIDE DEVICES BASED ON BULK SILICON MEMS TECHNOLOGY
基于体硅微机械工艺的光波导器件封装技术
10.
Study on MEMS Optical Switch Based on Vertical Torsional Micromirror;
转动竖直微镜的硅微机械光开关研究
11.
Related Techniques of a New Micro-accelerometer Based on Non-silicon MEMS;
基于非硅MEMS的新型微机械加速度计若干技术的研究
12.
Design and fabrication of novel high-impact silicon micro-mechanical accelerometer
新型高量程冲击硅微机械加速度传感器的设计与制造
13.
Computer management system of machining man-hour ration calculation;
机械加工工时定额计算的微机管理系统
14.
The Present situation and Applicaton Studyof Micromechanism (MEMS) and their Microfabrication technology
微机械及其微细加工技术的现状和应用研究
15.
Design and Fabrication of a Novel MEMS Silicon Spring
一种新型微机械硅弹簧的设计与制作
16.
Study on Dynamic Pressure and Temperature of Slurry in Chemical-Mechanical Polishing of Silicon Wafer
硅片化学机械抛光加工区域中抛光液动压和温度研究
17.
allowance for machining
机械加工公差机械加工余量
18.
Properties of Excimer Laser Etching of Typical MEMS Materials
典型微机械材料的准分子激光加工特性