1.
The Fabrication of Plane Thin-film H_2S Gas Sensor with Sputtering Method;
利用磁控溅射仪制作平面薄膜型H_2S硅微传感器
2.
On the stability of silicon microstructure acceleration transducer
硅微结构加速度传感器稳定性的研究
3.
Research of MEMS Bionic Vector Hydrophone Based on Silicon;
硅微MEMS仿生矢量水声传感器研究
4.
Study on PDMS-Si Machined Micro-liquid Flow Sensor
基于PDMS-硅的液体微流量传感器研究
5.
Silicon Micro-pressure sensor based on Meso-piezoresistance
介观压阻型硅微压力传感器仿真分析
6.
Micro phenomena measurement to silicon resonant microsensor are resented in this paper.
主要论述硅谐振微传感器中微现象测量。
7.
Study on the Detect-Circuit of the Capacitive Micro-Accelerometer Sensor by Silicon
硅微电容式加速度传感器检测电路研究
8.
Electric Field Micro-sensor with a Closed-loop Autonomous Driving Circuit
一种闭环自激式驱动的硅微机械电场传感器
9.
MEMS-based Micro-silicon Piezoresistive Accelerometer Design
基于MEMS的硅微压阻式加速度传感器设计
10.
Static Error Calibration of Micro-Machined Capacitance Accelerometer
R电容式硅微加速度传感器静态误差的标定
11.
Research on Thick Film Hybrid Integration Fabrication and Program of Micromechanical Accelerometer;
硅微加速度传感器厚膜混合集成方案与工艺研究
12.
Research on Silicon-based Bulk Micro-machined Amperometric Microelectrode Biosensors;
基于体硅加工技术的安培型微电极生物传感器研究
13.
Study on a Novel Type of Piezoresistive Micro-silicon Accelerometer Based on the Cantilever with Rectangular-slits Structure
基于孔缝悬臂梁结构的新型压阻式硅微加速度传感器研究
14.
Design and fabrication of novel high-impact silicon micro-mechanical accelerometer
新型高量程冲击硅微机械加速度传感器的设计与制造
15.
Research of Nc-Si/c-Si Heterojunction MOSFETs Pressure-magnetic Mutli-sensor;
纳米硅/单晶硅异质结MOSFETs压/磁多功能传感器研究
16.
Demodulation of PGC signal based on FPGA for micro-machined fiber-optic microphone
硅微光纤传声器PGC信号的FPGA数字解调
17.
Micro-machined static mixers only 22mm2, etched from silicon wafers, can be used for small chemical sensors.
微型加工的静态混合器只有22mm2大，由硅片刻蚀而来，可用于小型化学传感器。
18.
Special Sensor Microwave/Imager
特别传感微波/成像器