1.
raster scan electron beam system
光栅扫描电子束光刻系统
2.
Study on Key Technologies in UV-LED Fiber Lithography System
紫外LED光纤光刻系统关键技术研究
3.
High Precision Laser Direct Writing System for Micro-optical Device;
高精度微光学器件激光直写光刻系统研究
4.
Research of SOCS Based Simulation Algorithm of Optical Lithography System;
基于SOCS的光学光刻系统仿真算法的研究
5.
Research of Focus Optical System Used in Ultraviolet Photolithography;
用于紫外光刻的聚焦光学系统的研究
6.
Alignment System with Multi-Grating Mark for Lithographic Apparatus
用于光刻装置的多光栅标记对准系统
7.
Systematic Control Exploitation for Critical Dimension and Overlay in Photolithography Technology
光刻工艺中对线宽和套刻系统性控制的开发
8.
An experimental double-beam and double-exposure interference photolithographic system has been established.
建立了双光束双曝光干涉光刻实验系统。
9.
Research and Manufacture on Control System of Laser Engraving Machine Based on 80C196KC;
基于80C196KC的激光雕刻机控制系统研制
10.
Study of Laser Marking Control System Based on DSP &CPLD;
基于DSP&CPLD的激光标刻控制系统的研究
11.
Focusing and Leveling System for Lithography Tool Based on Machine Vision;
基于机器视觉的光刻机调焦调平系统
12.
Study and Application of the Super High-Speed Laser Marking Control System
超高速激光标刻控制系统研究与实现
13.
Research on Laser Marking Control System Based on PCI Bus
基于PCI的激光标刻控制系统研究
14.
Design for the Stucture of Laser Carving System Applied with Transmitting Energy Fiber;
应用传能光纤激光雕刻系统的结构设计
15.
Reserch and Design on the Laser Trim Table Control System of Laser Resistor Trim;
激光调阻机光刻平台系统控制研究与设计
16.
Two-mirror system design study of reduced projection optics for EUV Lithography;
极紫外投影光刻两镜微缩投影系统的光学设计
17.
Research on Image Processing for Lasser Carving System of Transmitting Energe Fiber
传能光纤激光雕刻系统图像处理的研究
18.
Research on Machining-path Algorithm of Laser Cutting and Carving System;
激光切割雕刻系统加工路径算法的研究