1.
Manufacturing Technologies for MEMS at Micro/Nanometer Level
微/纳米级微电子机械系统制造新技术
2.
Study on a New Electromagnetic Micromotor in Micro Electronic Mechanical System;
微电子机械系统中新型电磁微电机的研究
3.
Analysis and Design of the Architecture in 3D MEMS
三维微电子机械系统结构分析与设计
4.
NEW MEMS MANUFACTURING TECHNOLOGIES
微电子机械系统的新制造工艺技术(英文)
5.
Measurement of Angular Velocity in MEMS by Optical Method
微电子机械系统中转速测量的光学方法
6.
The Advances in Wafer Bonding and MEMS
晶圆键合技术与微电子机械系统新进展
7.
Research on the Testing Method of Mechanical Properties of Mems Materials
微电子机械系统材料力学性能测试方法的研究
8.
Research on Mechanical Properties and Size Effects in Mems;
微电子机械系统力学性能及尺寸效应研究
9.
Exploiting the Advantage of Regional Economy to Develop Micro Electro Mechanical System and Industry;
利用区域经济优势发展微电子机械系统及产业
10.
Some Microelectromechanical Systems and Related LIGA Techniques
若干微电子机械系统研制及相关LIGA工艺研究
11.
Research Advances of the Bonding Strength Measurements in MEMS
微电子机械系统键合强度检测方法研究进展
12.
With the rapid development of MEMS technology, micro-fluids technology has been becoming one of the hot research domains of MEMS step by step.
伴随微电子机械系统的发展，微流体技术成为微电子机械领域研究的热门。
13.
Study of a highly sensitive miniature condenser microphone based on MEMS technology
基于微电子机械系统技术的高灵敏度电容式微传声器的研制
14.
STUDY ON THE MICRO-TORQUE MEASUREMENT FOR MICRO-ACTUATORS IN MEMS
微电子机械系统中微致动器力矩测试技术的研究
15.
Theory and Design of Optical Current Sensor Based on MEMS
基于微电子机械系统的光学电流传感器原理与设计
16.
RESEARCH ON COUPLED ELECTRO-MECHANICAL ANALYSIS AND APPLICATION FOR TYPICAL COMPONENTS IN MEMS
微电子机械系统中典型构件的力电耦合分析及其应用研究
17.
at last,points out the development of MEMs applied on medical practice.
最后提出了应用于医疗领域中的微电子机械系统的发展前景。
18.
Study on Preparation and Application of Porous Silicon-Key Material in MEMS
微电子机械系统中重要材料—多孔硅的制备和应用的研究