1.
The weak resonant signal was picked up by piezo-resistor Wheatstone bridge designed and fabricated on the silicon micro-cantilever.
电热激励利用在硅微机械悬臂梁表面优化设计的热激励电阻加以实现。
2.
Micromechanical Resonant Cantilever Sensors for Bio/chemical Detection;
生化检测用集成微机械悬臂梁谐振传感器技术
3.
Theoretical Study of Giant Magnetostrictive Micromachined Cantilever System;
超磁致伸缩微机械悬臂梁系统的理论研究
4.
Bi-Material Microcantilever’s Thermomechanical Performance and Materials Selection: An Analysis;
双金属微悬臂梁的选材及热机械性能分析
5.
Research on Fabrication of Silicon Micro-cantilevers based on MEMS Technology
基于MEMS技术硅微悬臂梁制作工艺研究
6.
Study on the Mechanical Characteristics of Micro Cantilever Using Micro Laser Doppler Technology;
利用显微激光多普勒技术测量微悬臂梁的机械特性
7.
The Fracture Reliability Model of Polycrystalline Silicon Microcantilever;
多晶硅微悬臂梁断裂失效的可靠性模型建立
8.
Study on a Novel Type of Piezoresistive Micro-silicon Accelerometer Based on the Cantilever with Rectangular-slits Structure
基于孔缝悬臂梁结构的新型压阻式硅微加速度传感器研究
9.
cantilever beam impact tester
悬臂梁式冲击试验机
10.
rotating cantilever beam type machine
旋转悬臂梁式试验机
11.
Study on the Quality Factor Control Technology of the Microcantilever;
微悬臂梁品质因数Q控制技术的研究
12.
Reliability for Microcantilever Device Manufacture Craft
微悬臂梁器件制作工艺的可靠性研究
13.
Design and Simulation of Micromachined Silicon Condenser Microphone with Free Floating Diaphragm
具有自由悬浮敏感膜的硅微机械电容式麦克风的设计与仿真计算
14.
CONTROLLING CHAOTIC MOTION IN THE MICROCANTILEVER OF AN ATOMIC FORCE MICROSCOPY
原子力显微镜微悬臂梁的混沌运动控制
15.
Performance of Micro One-sided Straight-leg Beam Resonator and Cascade V-Shape Thermal Actuator;
硅微单侧直脚谐振器与复合V型梁热致动器的机械性能研究
16.
Keywords: micro-cantilever sensor, mechanical model, piezo-resistive materials, finite element method.
关键词：微悬臂梁感测器、学模型、阻材料、限元素法。
17.
Design and Fabrication of an Accelerometer with Novel "8-beams/mass" Structure;
“8悬臂梁—质量块”结构的新型微加速度计研究
18.
The Reliability Analysis of Surface-Micromachined Microcantilever Subjected to Vibration Environment;
表面微加工悬臂梁在振动环境下的可靠性分析