1.
Design and Fabrication of Thermally Excited Si_3N_4 Resonant Beam Pressure Sensor;
热激励氮化硅谐振梁压力传感器的设计与制作
2.
Performance of Micro One-sided Straight-leg Beam Resonator and Cascade V-Shape Thermal Actuator;
硅微单侧直脚谐振器与复合V型梁热致动器的机械性能研究
3.
The Analysis of the Silca-Based SiO_2 Waveguide Passive Ring Resonator;
硅基二氧化硅光波导无源环形谐振器研究
4.
Research on the Technology of the Silicon-Based SiO_2 Waveguide Passive Ring Resonator
硅基二氧化硅光波导环形谐振器的技术研究
5.
Structure design and simulation of micromechanical silicon oscillating accelerometer
硅微谐振式加速度计结构设计与仿真
6.
Study on the Measurement and Characterization of Nanobeam Resonator
纳米梁谐振器的测试与表征方法研究
7.
Analysis of squeeze-film damping influences on vibration characteristics of micro-beam resonators with perforations
压膜阻尼对有孔微梁谐振器振动特性影响分析
8.
Micro phenomena measurement to silicon resonant microsensor are resented in this paper.
主要论述硅谐振微传感器中微现象测量。
9.
The Study of the Si-based Ring-resonator Optical Modulator and Switch
硅基的环形谐振腔光调制器和光开关的研究
10.
Analysis of the Resonant Frequency of Capacitive Micro-Machined Ultrasonic Transducer(cMUT) with Finite Element Method
硅微电容式超声换能器谐振频率的有限元分析
11.
Performance Compare of Lateral Polysilicon Comb-drive Microresonators with Different Flexural Suspensions
不同型式支撑的静电硅微谐振器的性能比较
12.
Silicon micromachined resonant accelerometer based on ZnO nanowire
基于氧化锌纳米线的硅谐振式加速度计(英文)
13.
Mechanical Performance of Micro One-sided Straight-leg Beam Resonator
静电梳状硅微单侧直脚谐振器的力学性能
14.
Research on Detecting-circuit for Silicon Micromechanical Resonant Gyroscope Based on PLL Demodulator
基于锁相解调的硅微谐振陀螺检测电路研究
15.
Analysis of Rayleigh Backscattering Noise in Micro-Optical Resonance Gyroscope
硅基微光学谐振式陀螺瑞利背向散射噪声分析
16.
Design of data acquisition system for silicon micromachined resonant accelerometer
硅微谐振式加速度计数据采集系统设计
17.
Micromechanical Resonant Cantilever Sensors for Bio/chemical Detection;
生化检测用集成微机械悬臂梁谐振传感器技术
18.
Research on Theory and Correlation Technique of Side-Polished Fiber Microbeam Resonator Excited Optically;
光纤微梁谐振器的理论及相关技术研究