1.
MW-ECR Plasma Enhanced Unbalance Magnetron Sputtering and Carbon Nitride Films Preparation;
微波-ECR等离子体增强非平衡磁控溅射技术及CN薄膜的制备研究
2.
Studies on Discharge Characteristics and Applications of ICP Enhanced Unbalanced Magnetron Sputtering in Cusp-field Confined Magnetron;
会切场约束ICP增强非平衡磁控溅射放电及应用研究
3.
Software Design of Real-time Monitoring System of Unbalanced Magnetron Sputtering Ion-plating Equipment in Closed Field;
闭合场非平衡磁控溅射离子镀装备实时监控系统软件设计
4.
Fabrication of Diamond-like Carbon Films by Ion Enhanced Middle Frequency Unbalanced Magnetron Sputtering;
离子辅助中频非平衡磁控溅射制备类金刚石薄膜
5.
Research of Ti-N-C Films Deposited by Ion Beam Assistant MF Twin Target Unbalanced Magnetron Sputtering;
离子束辅助中频非平衡磁控溅射制备Ti-N-C膜的研究
6.
Influence of unbalanced coefficient of magnetron and closed-state of magnertic field on plating Cr coating using a sputtering ion plating system
非平衡度和闭合状态对磁控溅射离子镀过程的影响
7.
Study on Oxidation Resistant Behavior at High-temperature of TiN,TiAlN Coatings Prepared by Unbalanced Magnetron Sputtering
非平衡磁控溅射离子镀TiN、TiAlN涂层抗高温氧化行为的研究
8.
Ti–Si–C–N Based Nanocomposite Coatings Produced by Plasma Enhanced Magnetron Sputter Deposition and its Erosion Resistance
等离子增强磁控溅射Ti–Si–C–N基纳米复合膜层耐冲蚀性能研究
9.
Plasma emission spectra of ZnO and ZAO thin film grown by RF magnetron sputtering
ZnO和ZAO薄膜磁控溅射等离子体发射光谱
10.
Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP film
等离子体发射光谱诊断用于射频磁控溅射GaP薄膜的工艺参数优化
11.
Study on Compositions Controlling and Properities of Magnetron Sputtering Films Based on Plasma Optical Emission Spectroscopy
基于等离子体光发射谱的磁控溅射薄膜成分控制及性能研究
12.
Study of MoS_2-Ti Composite Coatings Deposited by Unbalanced Magnetron Sputtering;
非平衡磁控溅射沉积MoS_2-Ti复合薄膜研究
13.
Studies in the Technologies for the a-C:H Films Prepared by Middle Frequency Unbalanced Magnetron Sputtering;
中频非平衡磁控溅射制备DLC膜的工艺研究
14.
Study on NiCoCrAlY Coating Using Unbalanced Magnetron Sputtering on Titanium Alloy Surface
钛合金表面非平衡磁控溅射沉积NiCoCrAlY涂层
15.
Analysis of Structure of Cr-doped GLC Coatings Deposited by Unbalanced Magnetron Sputtering
非平衡磁控溅射掺Cr类石墨镀层的结构分析
16.
Microstructures and Properties of Silicon Nitride Films Grown by Unbalanced Magnetron Sputtering
非平衡磁控溅射制备氮化硅薄膜及其性能研究
17.
Influence of oxidation temperature on microstructure and properties of unbalanced magnetron sputtered TiN coatings
热氧化温度对非平衡磁控溅射TiN镀层的影响
18.
Plasma Characteristics of Mid-frequency Dual-targets Magnetron Sputtering System and Oxide Films Deposition Research;
中频孪生磁控溅射等离子体特性与氧化物薄膜沉积研究