1.
Study on MEMS Optical Switch Based on Vertical Torsional Micromirror;
转动竖直微镜的硅微机械光开关研究
2.
The Theoretical Analysis and Manufacture of 1×4 Mechanical-Optical Switch;
1×4机械式光开关的理论分析与研制
3.
Study on the Key Technology of Radio Frequency MEMS Switch and Amplifier
射频微机械开关与放大器关键技术研究
4.
Design and analysis of novel RF MEMS switches with coplanar waveguide based on cavity structure
一种新型腔体式共面波导型微机械射频开关
5.
A Study on the Test Technique for RF MEMS CPW Switch
射频微机械共面波导开关测试技术研究
6.
Design and Process of a Novel RF MEMS Latching Switch;
新型锁存射频微机械开关的设计与工艺研究
7.
device for tripping a mechanism
松开机械开关的装置.
8.
trip free mechanical switching device
自由释放机械式开关
9.
The Application of MEMS Gyroscope in Electro-Optical Platform on Aircraft
微机械陀螺在机载光电平台中的应用
10.
Analysis of micro-forces in MEMS
微机械中微观力的几个关键问题分析
11.
Nonlinear Dynamic Characteristics Analysis and Design of a MEMS Inertial Sensing Device
微机械惯性开关的非线性动力学特性分析与设计(英文)
12.
Mechanical System Design of the Microbeam and Microdomains X-ray Probe Analyzer
微束微区X荧光探针仪的机械系统设计
13.
Studying on the Optical Tweezers Technique and Its Application in Optically Driven Micromachine Motors
光镊技术及其在光驱动微机械马达的应用研究
14.
PACKAGING OF WAVEGUIDE DEVICES BASED ON BULK SILICON MEMS TECHNOLOGY
基于体硅微机械工艺的光波导器件封装技术
15.
Measurement of Angular Velocity in MEMS by Optical Method
微电子机械系统中转速测量的光学方法
16.
Properties of Excimer Laser Etching of Typical MEMS Materials
典型微机械材料的准分子激光加工特性
17.
Theoretical and Experimental Research on the Si-based MOEMS Acceleration Seismic Geophone;
硅微光机械加速度地震检波器理论与实验研究
18.
Research and Fabrication on the Si-based MOEMS Acceleration Seismic Geophone;
硅基微光机械加速度地震检波器的研制