1.
PACKAGING OF WAVEGUIDE DEVICES BASED ON BULK SILICON MEMS TECHNOLOGY
基于体硅微机械工艺的光波导器件封装技术
2.
Design and fabrication of bulk micromachined tunneling gyroscope with fan-shaped comb drivers
扇形梳齿驱动式体硅微机械隧道陀螺仪的设计与制备(英文)
3.
Errors Analysis of Silicon Micro-machined Gyroscope Driven by Rotating Carrier
旋转载体驱动的硅微机械陀螺误差研究
4.
Study on MEMS Optical Switch Based on Vertical Torsional Micromirror;
转动竖直微镜的硅微机械光开关研究
5.
Design and Fabrication of a Novel MEMS Silicon Spring
一种新型微机械硅弹簧的设计与制作
6.
Millimeter-wave Silicon Micromachined Shielded Membrane Microstrip Line and Filter
毫米波硅基微机械屏蔽膜微带线和滤波器
7.
ROBUST STRUCTURE DESIGN FOR MEMS FILTRERS IN TELECOMMUNICATION
电信系统中的硅微机械滤波器结构鲁棒设计
8.
Theoretical and Experimental Research on the Si-based MOEMS Acceleration Seismic Geophone;
硅微光机械加速度地震检波器理论与实验研究
9.
Research on Design and Read-out Technology of Comb Silicon Micro-mechanical Accelerometer;
叉指式硅微机械加速度计设计与检测技术研究
10.
Research and Fabrication on the Si-based MOEMS Acceleration Seismic Geophone;
硅基微光机械加速度地震检波器的研制
11.
Research on Factors of Zero Position Offset in Silicon Mechanical Micro-accelerometer;
硅微机械加速度计零位偏移的影响因素研究
12.
Electric Field Micro-sensor with a Closed-loop Autonomous Driving Circuit
一种闭环自激式驱动的硅微机械电场传感器
13.
Non-linearity Compensation Algorithm and Realization for the Output Signal of Silicon Micromachined Gyroscope
硅微机械陀螺信号非线性补偿算法及实现
14.
Research and Test on Silicon Micro-Gyroscope Temperature Characteristics
硅微机械陀螺表头温度特性研究与测试
15.
Structure and dynamic characteristics of silicon condenser micromachined microphone
电容式硅微机械麦克风的结构与动态特性
16.
Research on Analog Signal Detecting of Silicon Micro-Machined Gyroscope
硅微机械陀螺仪模拟信号检测技术研究
17.
Temperature Compensation of MEMS Accelerometer in Attitude Heading Reference Systemm
姿态参照系统中硅微机械加速度计的温度补偿
18.
Study on Preparation and Application of Porous Silicon-Key Material in MEMS
微电子机械系统中重要材料—多孔硅的制备和应用的研究