1.
Research on Process of Polysilicon Nanofilm Pressure Sensor
多晶硅纳米薄膜压力传感器工艺研究
2.
Pressure Nonlinearity of Micromachined Pressure Sensors
微机械加工薄膜压力传感器的非线性特性
3.
Study of ZnO Thin Film Piezoelectric Micro Force Sensor/Actuator;
ZnO薄膜压电微力传感器/执行器研究
4.
Effect of Residual Stress on the Properties of Piezoelectric Thin Films;
残余应力对压电薄膜材料性能的影响
5.
Piezoresponse Force Microscopy Studies of (Pb_(0.76)Ca_(0.24))TiO_3 Thin Films
（Pb_（0.76）Ca_（0.24））TiO_3薄膜的压电力显微镜研究
6.
Micromachining of Membrane and Cavity in Micro Pressure Sensors
微型压力传感器薄膜凹槽的制造技术
7.
The Stress-Strain Relationships of Thin Films Characterized by Nanoindentation;
用纳米压痕法表征薄膜的应力—应变关系
8.
The Relationship between Infrared Absorption and Compressive Stress of the Cubic Boron Nitride Films;
立方氮化硼薄膜中压应力与红外吸收的关系
9.
The Mechanical Analysis of Micromachined Accelerometer with Piezoelectric Thin Films Read-out;
压电薄膜微机电加速度传感器的力学分析
10.
A Study on Atmospheric Pressure Chemical Vapor Deposition of TiN Film and Its Kinetics;
TiN薄膜常压化学气相沉积及动力学研究
11.
Mechanical properties of diamond-like carbon thin films measured by nano indentation method
应用纳米压痕法测试类金刚石薄膜的力学性能
12.
Spallation Behavior of Thermally Grown Oxide Ceramic Film under Compressive Stresses
热生长陶瓷薄膜在压应力作用下的脱落行为
13.
Influences of deposition rate and oxygen partial pressure on residual stress of HfO_2 films
沉积速率和氧分压对HfO_2薄膜残余应力的影响
14.
Influence of oxygen partial pressure on residual stresses of TiO_2 films prepared by electron beam evaporation
氧分压对电子束蒸发TiO_2薄膜残余应力的影响
15.
Influences of Oxygen Partial Pressure and Deposition Rate on Residual Stress of YSZ Thin Films
氧分压和沉积速率对YSZ薄膜残余应力的影响
16.
Effect of Oxygen Partial Pressure on the Structure and Mechanical Properties of HfO_xN_y Thin Films
氧分压对HfO_xN_y薄膜结构和力学性能的影响
17.
The deposition rate increases with the increasing of bias voltage pressure.
类金钢石薄膜的沉积速率随极板负偏压、体工作压力的增加而增大。
18.
The film is anchored to the ground, and the pressure holds it up very cheaply.
此薄膜锚固在地面上，花很小的费用就可用压力将它撑起。