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1)  planar magneton sputting
平面磁控溅射
2)  unbalanced magnetron sputtering
非平衡磁控溅射
1.
Characteristics of titanium-doped diamond-like carbon films deposited by unbalanced magnetron sputtering;
非平衡磁控溅射Ti掺杂类金刚石薄膜的基本特性
2.
The research on half-analytical method in calculating the magnetic field of unbalanced magnetron sputtering;
非平衡磁控溅射系统磁场的半解析法
3.
Effect of Al content on properties of Ti_(1-x)Al_xN hard film prepared by unbalanced magnetron sputtering;
Al含量对非平衡磁控溅射制备Ti_(1-x)Al_xN膜性能的影响
3)  Magnetron/unbalanced
磁控溅射/非平衡
4)  magnetron sputtering
磁控溅射
1.
Preparation and characterization of anti-bacterial nonwovens by magnetron sputtering rare-earth activated TiO_2 onto PET fabric;
磁控溅射制备稀土激活TiO_2复合抗菌非织造布
2.
Effect of depositing process on microstructure chromium nitride coatings deposited by reactive magnetron sputtering;
反应磁控溅射沉积工艺对Cr-N涂层微观结构的影响
3.
Characterization study of Al magnetron sputtering coating on AZ31 magnesium alloy;
AZ31镁合金磁控溅射镀铝膜的性能研究
5)  RF magnetron sputtering
磁控溅射
1.
Investigation on organic light-emitting diodes with TiO_2 ultra-thin films as hole buffer layer by RF magnetron sputtering;
磁控溅射法制备TiO_2空穴缓冲层的有机发光器件
2.
ZrN films were synthesized by inductively coupled plasma(ICP)-assisted RF magnetron sputtering.
利用电感耦合等离子体(ICP)辅助射频磁控溅射技术,在Si(111)片表面制备了ZrN薄膜。
3.
The ZnO films were grown on quartz substrates by rf magnetron sputtering.
本工作利用磁控溅射技术在石英衬底上生长出沿c轴择优取向的未掺杂ZnO薄膜,利用X射线衍射,光致发光,X射线光电子谱和Hall效应测量技术,研究了退火温度对结构、电学和光学性质的影响。
6)  magnetic sputtering
磁控溅射
1.
Power supply feedback control of industrial giant target during magnetic sputtering;
工业用巨型磁控溅射靶电源反馈控制的研究
2.
Preparation and analysis of In_2O_3-SnO_2 thin films deposited by magnetic sputtering;
磁控溅射制备In_2O_3-SnO_2薄膜与分析
3.
The fabrication of plane thin-film H_2S gas sensor with magnetic sputtering method;
利用磁控溅射仪制作平面薄膜型H_2S硅微传感器
补充资料:磁控溅射
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性质:用一个环形永久磁体在乎板形靶上产生环形磁场,在磁场作用下,电子被约束在一个环状空间内,形成高密度的等离子环。在等离子环内,电子不断地使Ar原子变成Ar离子,Ar离子被加速后打向靶表面,把靶内的原子溅射出来,沉积在基片上形成薄膜。若靶材为导体,溅射电源可用直流或射频电源,如靶材是绝缘体,则必须用射频电源。用多源共溅射加后处理法可制备双面薄膜。将基片放置在靶中心线上,称为正轴溅射,基片放在靶轴线外;称为偏轴溅射。磁控溅射是广泛采用的制膜方法。

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