c-Si∶H/a-Si∶H multilayers have been prepared with RF glow-discharge method in which two types of coupling electrodes are alternately changed periodically.

The deposition of diamond-like carbon films produced by radio frequency glow discharge of hydrocarbon gas was studied,and the effects of radio frequency voltage and deposition time on the thickness and the Vickers microhardness of films were investigated.

Plasma chemical vapor deposition in silane radio frequency glow discharge is a main fabrication technology of hydrogenated amorphous silicon(a-Si:H)films.

This paper reports that a heated and tuned Langmuir probe has been used on the measurement of the electron energy distribution function f(E), the mean electron energy and the electron concentration in radio frequency glow discharge plasma, and gives a systemic analysis about the effect of the technology parameters on the electron character in plasma space.

Optical emissiom spectra of SiH 4 rf glow discharge were measured by OMA-4000.

The influence of power (5-18 W) and discharge pressure (5-15 Torr) on emission intensity of element and stability of intensity ratios in middle-low alloy steel using radio frequency glow discharge optical emission spectrometry (rf-GD-OES) were investigated, and the reasons of the influence were analyzed.

Analytical performance of glow discharge optical emission spectrometry with neon-argon mixed gases in determination of aluminum in steel samples;