1) silicon cantilever
硅悬梁
1.
Two kinds of sensors were designed: silicon membrane wind speed and direction sensor,and silicon cantilever wind speed and direction sensor.
设计了两种基于MEMS工艺的固态测风传感器,即硅薄膜式测风传感器和硅悬梁式测风传感器,用流体力学原理对这两种风速风向传感器进行了理论分析及ANSYS CFD软件模拟仿真,得出了风速与挠度、剪切力的关系。
2.
Two kinds of sensors were designed:silicon membrane wind speed and direction sensor,and silicon cantilever wind speed and direction sensor.
设计了两种基于 MEMS 工艺的固态测风传感器,即硅薄膜式测风传感器和硅悬梁式测风传感器,用流体力学原理对这两种风速风向传感器进行了理论分析及 ANSYS CFD 软件模拟仿真,得出了风速与挠度、剪切力的关系。
2) Micro-machining silicon cantiliver
硅悬臂梁
4) silicon micro-cantilever
硅微机械悬臂梁
1.
The resonant characteristics of the silicon micro-cantilever resonator were investigated under electro-thermal resistor excitation.
采用电热激励、压电拾取方法对硅微机械悬臂梁的谐振性能进行了实验研究。
5) Silicon cantilever resonator
硅悬臂梁谐振子
6) bi-material silicon microcantilever
硅基双层微悬臂梁
补充资料：悬梁
1.《太平御览》卷三六三引《汉书》:"孙敬字文寶，好学，晨夕不休。及至眠睡疲寝，以绳系头，悬屋梁。后为当世大儒。"后因以"悬梁"指苦学。 2.自缢，上吊。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条