Based on the reflected light interference method,the principle of real-time measurement system for growth rate of monolayer film is briefly introduced in this article and the simplified double-beam interference model is built.

Measuring the refraction index of single thin film by transmission method;

Study of ZnO film growth by reactive magnetron sputtering using plasma emission spectra;

Simulation of 3-dimensional thin film growth on heterogeneous substrate;

Molecular dynamics simulations on GaN film growth;

Study of real time monitoring epitaxial thin film growth;

Application of computer: Monte Carlo simulation of thin film growth;