1) Precision stage
精密工件台
1.
According to the needs of the precision stage for measurement system,a three-axis measurement method was employed,and the method of calculating the number of the components in measurement system was introduced.
根据精密工件台对测量系统的需要,设计了三轴工件台测量系统布局方式,并简单介绍了激光干涉测量系统所需元器件数量的计算方法。
2) Micro-displacement Precision Work Table
微动精密工件台
3) supper-precision stage
超精密工件台
1.
Motion control of supper-precision stage;
超精密工件台的运动控制
4) x-y 2 dimension precision stage
x-y二维精密工件台
5) precision stage
精密工作台
1.
High acceleration movements of a precision stage result in reaction forces that lead to mechanical resonance in the stage,which reduces the tracking accuracy and lengthens the positioning time.
精密工作台高加减速的运动反力作用于机台上,会引起机台机械共振,使轨迹跟踪精度降低、定位建立时间加长,针对这一问题,提出了基于精密工作台振动模型,采用极点配置、模型参数匹配的方法设计P ID控制器。
2.
The precision stage driven by a linear-motor and sustained by air-bearing tracks has the characteristics of zero mechanical damping and weak anti-disturbance.
针对直线电机驱动、气浮导轨支撑的精密工作台没有机械阻尼、抗扰动性能差的特点,为了在较短的位置伺服周期内(110μs)抑制工作台上的线缆扰动以及直线电机推力波动的影响,提高工作台的轨迹跟踪精度,采用了基于精密工作台名义模型的方法设计扰动观测器,构成PD+扰动观测器的运动控制结构。
3.
In order to improve the tracking accuracy and dynamical response of the precision stage,based on the discrete model of the identified control object,pole assignment method is used to design the feedforward loop and feedback loop of the motion controller for the precision stage.
为了提高精密工作台的轨迹跟踪精度和动态响应性能,基于辨识出的控制对象离散化模型,利用极点配置方法设计了精密工作台运动控制器的前馈环节和反馈环节,构成具有两自由度结构的精密工作台运动控制系统。
6) precision table
精密工作台
1.
Research on manufacturing point displacement calculation of NC precision table of six slides under vertical load and torque load;
数控六滑块精密工作台系统加工点位移计算的研究
2.
The Calculation of Displacement in Manufacturing Point of NC Precision Table;
数控6滑块精密工作台加工点位移计算的研究
补充资料：动微
1.洞察精微。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条